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Small, Low Power, 2-Axis 3 g i MEMS(R) Accelerometer
ADXL323
FEATURES
2-axis sensing Small, low-profile package 4 mm x 4 mm x 1.45 mm LFCSP_LQ Low power 180 A at VS = 1.8 V (typical) Single-supply operation 1.8 V to 5.25 V 10,000 g shock survival Excellent temperature stability BW adjustment with a single capacitor per axis RoHS/WEEE lead-free compliant
GENERAL DESCRIPTION
The ADXL323 is a small, thin, low power, complete 2-axis accelerometer with signal-conditioned voltage outputs, all on a single, monolithic IC. The product measures acceleration with a minimum full-scale range of 3 g. It can measure the static acceleration of gravity in tilt-sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The user selects the bandwidth of the accelerometer using the CX and CY capacitors at the XOUT and YOUT pins. Bandwidths can be selected to suit the application, with a range of 0.5 Hz to 1600 Hz. The ADXL323 is available in a small, low profile, 4 mm x 4 mm x 1.45 mm, 16-lead, plastic lead frame chip scale package (LFCSP_LQ).
APPLICATIONS
Cost-sensitive, low power, motion- and tilt-sensing applications Mobile devices Gaming systems Disk drive protection Image stabilization Sports and health devices
FUNCTIONAL BLOCK DIAGRAM
+3V
VS
ADXL323
RFILT 2-AXIS SENSOR CDC AC AMP DEMOD RFILT OUTPUT AMP YOUT CY OUTPUT AMP CX XOUT
Figure 1.
Rev. 0
Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 (c)2006 Analog Devices, Inc. All rights reserved.
06237-001
COM
ST
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ADXL323 TABLE OF CONTENTS
Features .............................................................................................. 1 Applications....................................................................................... 1 General Description ......................................................................... 1 Functional Block Diagram .............................................................. 1 Revision History ............................................................................... 2 Specifications..................................................................................... 3 Absolute Maximum Ratings............................................................ 4 ESD Caution.................................................................................. 4 Pin Configuration and Function Descriptions............................. 5 Typical Performance Characteristics ............................................. 6 Theory of Operation ...................................................................... 11 Mechanical Sensor...................................................................... 11 Performance ................................................................................ 11 Applications..................................................................................... 12 Power Supply Decoupling ......................................................... 12 Setting the Bandwidth Using CX, CY, and CZ.......................... 12 Self Test ........................................................................................ 12 Design Trade-Offs for Selecting Filter Characteristics: The Noise/BW Trade-Off.................................................................. 12 Use with Operating Voltages Other Than 3 V ........................... 12 Axes of Acceleration Sensitivity ............................................... 13 Outline Dimensions ....................................................................... 14 Ordering Guide .......................................................................... 14
REVISION HISTORY
8/06--Revision 0: Initial Version
Rev. 0 | Page 2 of 16
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ADXL323 SPECIFICATIONS
TA = 25C, VS = 3 V, CX = CY = 0.1 F, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. Table 1.
Parameter SENSOR INPUT Measurement Range Nonlinearity Package Alignment Error Inter-Axis Alignment Error Cross Axis Sensitivity 1 SENSITIVITY (RATIOMETRIC) 2 Sensitivity at XOUT, YOUT Sensitivity Change Due to Temperature 3 ZERO g BIAS LEVEL (RATIOMETRIC) 0 g Voltage at XOUT, YOUT 0 g Offset vs. Temperature NOISE PERFORMANCE Noise Density XOUT, YOUT FREQUENCY RESPONSE 4 Bandwidth XOUT, YOUTT 5 RFILT Tolerance Sensor Resonant Frequency SELF TESTT 6 Logic Input Low Logic Input High ST Actuation Current Output Change at XOUT Output Change at YOUT OUTPUT AMPLIFIER Output Swing Low Output Swing High POWER SUPPLY Operating Voltage Range Supply Current Turn-On Time 7 TEMPERATURE Operating Temperature Range
1 2 3
Conditions Each axis % of full scale
Min 3
Typ 3.6 0.3 1 0.1 1 300 0.015 1.5 0.6 280
Max
Unit g % Degrees Degrees %
Each axis VS = 3 V VS = 3 V Each axis VS = 3 V
270
330
mV/g %/C V mg/C g/Hz rms Hz k kHz V V A mV mV V V
1.35
1.65
No external filter
1600 32 15% 5.5 +0.6 +2.4 +60 -150 +150 0.1 2.8 1.8 5.25 320 1 -25 +70
Self Test 0 to Self Test 1 Self Test 0 to Self Test 1 No load No load
VS = 3 V No external filter
V A ms C
Defined as coupling between two axes. Sensitivity is essentially ratiometric to VS. Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature. 4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY). 5 Bandwidth with external capacitors = 1/(2 x x 32 k x C). For CX, CY = 0.003 F, bandwidth = 1.6 kHz. For CX, CY = 10 F, bandwidth = 0.5 Hz. 6 Self-test response changes cubically with VS. 7 Turn-on time is dependent on CX, CY and is approximately 160 x CX or CY + 1 ms, where CX, CY are in F.
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ADXL323 ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter Acceleration (Any Axis, Unpowered) Acceleration (Any Axis, Powered) VS All Other Pins Output Short-Circuit Duration (Any Pin to Common) Temperature Range (Powered) Temperature Range (Storage) Rating 10,000 g 10,000 g -0.3 V to +7.0 V (COM - 0.3 V) to (VS + 0.3 V) Indefinite -55C to +125C -65C to +150C
Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability.
TP RAMP-UP
tP
CRITICAL ZONE TL TO TP
TEMPERATURE
TL
TSMAX TSMIN
tL
tS
PREHEAT
RAMP-DOWN
t25C TO PEAK
TIME
Figure 2. Recommended Soldering Profile
Table 3. Recommended Soldering Profile
Profile Feature Average Ramp Rate (TL to TP) Preheat Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) Time (TSMIN to TSMAX), tS TSMAX to TL Ramp-Up Rate Time Maintained Above Liquidous (TL) Liquidous Temperature (TL) Time (tL) Peak Temperature (TP) Time within 5C of Actual Peak Temperature (tP) Ramp-Down Rate Time 25C to Peak Temperature Sn63/Pb37 3C/sec max 100C 150C 60 sec to 120 s 3C/sec max 183C 60 sec to 150 sec 240C + 0C/-5C 10 sec to 30 sec 6C/sec max 6 minutes max Pb-Free 3C/sec max 150C 200C 60 sec to 180 sec 3C/sec max 217C 60 sec to 150 sec 260C + 0C/-5C 20 sec to 40 sec 6C/sec max 8 minutes max
ESD CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although this product features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality.
Rev. 0 | Page 4 of 16
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ADXL323 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
0.50 MAX 0.65 4 0.325
0.35 MAX
NC
16
15
14
13
NC
VS
VS
0.65
NC ST COM NC
1 2 3 4 5
ADXL323
TOP VIEW (Not to Scale) +Y
4
12 11 10
XOUT NC YOUT NC
1.95 0.325 CENTER PAD IS NOT INTERNALLY CONNECTED BUT SHOULD BE SOLDERED FOR MECHANICAL INTEGRITY
+X
6 7 8
9
COM
COM
COM
NC
1.95
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NC = NO CONNECT
DIMENSIONS SHOWN IN MILLIMETERS
Figure 3. Pin Configuration
Figure 4. Recommended PCB Layout
Table 4. Pin Function Descriptions
Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Mnemonic NC ST COM NC COM COM COM NC NC YOUT NC XOUT NC VS VS NC Description No Connect Self Test Common No Connect Common Common Common No Connect No Connect Y Channel Output No Connect X Channel Output No Connect Supply Voltage (1.8 V to 5.25 V) Supply Voltage (1.8 V to 5.25 V) No Connect
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ADXL323 TYPICAL PERFORMANCE CHARACTERISTICS
N > 1000 for all typical performance plots, unless otherwise noted.
16 14 12 16 14 12
% OF POPULATION
10 8 6 4
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% OF POPULATION
10 8 6 4
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2 0
0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09
2 0
0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09
OUTPUT (V)
OUTPUT (V)
Figure 5. X-Axis Zero g Bias at 25C, VS = 2 V
40 35 30 35 30 25 20 15 10 5 0 1.42
Figure 8. Y-Axis Zero g Bias at 25C, VS = 2 V
% OF POPULATION
25 20 15 10
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0 1.42 1.44 1.46 1.48 1.50 1.52 1.54 1.56 1.58 OUTPUT (V)
1.44
1.46
1.48
1.50
1.52
1.54
1.56
1.58
OUTPUT (V)
Figure 6. X-Axis Zero g Bias at 25C, VS = 3 V
30
Figure 9. Y-Axis Zero g Bias at 25C, VS = 3 V
30
25
25
% OF POPULATION
20
% OF POPULATION
20
15
15
10
10
5
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5
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0 2.30 2.34 2.38 2.42 2.46 2.50 2.54 2.58 2.62 2.66 2.70 OUTPUT (V)
0 2.30 2.34 2.38 2.42 2.46 2.50 2.54 2.58 2.62 2.66 2.70 OUTPUT (V)
Figure 7. X-Axis Zero g Bias at 25C, VS = 5 V
Figure 10. Y-Axis Zero g Bias at 25C, VS = 5 V
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5
% OF POPULATION
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ADXL323
35 30 25 20 15 10 5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 2.5 TEMPERATURE COEFFICIENT (mg/C) 40 35 30
% OF POPULATION
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% OF POPULATION
25 20 15 10
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5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 2.5 TEMPERATURE COEFFICIENT (mg/C)
Figure 11. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V
35
Figure 14. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V
40 35 30
% OF POPULATION
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30
% OF POPULATION
25 20
25 20 15 10
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15
10 5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 2.5 TEMPERATURE COEFFICIENT (mg/C)
5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 2.5 TEMPERATURE COEFFICIENT (mg/C)
Figure 12. X-Axis Zero g Bias Temperature Coefficient, VS = 5 V
1.55 N=8 1.54 1.53 1.52 1.51
VOLTS
Figure 15. Y-Axis Zero g Bias Temperature Coefficient, VS = 5 V
1.55 N=8 1.54 1.53 1.52 1.51
VOLTS
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1.50 1.49 1.48 1.47 1.46 1.45 -30
1.50 1.49 1.48 1.47 1.46 1.45 -30
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-20
-10
0
10
20
30
40
50
60
70
80
-20
-10
0
10
20
30
40
50
60
70
80
TEMPERATURE (C)
TEMPERATURE (C)
Figure 13. X-Axis Zero g Bias vs. Temperature; Eight Parts Soldered to PCB, VS = 3 V
Figure 16. Y-Axis Zero g Bias vs. Temperature; Eight Parts Soldered to PCB, VS = 3 V
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ADXL323
35 30 25 20 15 10 5 0 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 SENSITIVITY (V/g) 40 35 30
% OF POPULATION
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% OF POPULATION
25 20 15 10
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5 0 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 SENSITIVITY (V/g)
Figure 17. X-Axis Sensitivity at 25C, VS = 2 V
60 70 60 50 40 30 20 10 0 0.26
Figure 20. Y-Axis Sensitivity at 25C, VS = 2 V
50
% OF POPULATION
40
30
20
10
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0 0.26 0.27 0.28 0.29 0.30 0.31 0.32 0.33 0.34 SENSITIVITY (V/g)
% OF POPULATION
0.27
0.28
0.29
0.30
0.31
0.32
0.33
0.34
SENSITIVITY (V/g)
Figure 18. X-Axis Sensitivity at 25C, VS = 3 V
25 40 35 20 30
% OF POPULATION % OF POPULATION
Figure 21. Y-Axis Sensitivity at 25C, VS = 3 V
15
25 20 15 10
10
5
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5 0 0.50 0.51 0.52 0.53 0.54 0.55 0.56 0.57 0.58 0.59 0.60 SENSITIVITY (V/g)
0 0.50 0.51 0.52 0.53 0.54 0.55 0.56 0.57 0.58 0.59 0.60 SENSITIVITY (V/g)
Figure 19. X-Axis Sensitivity at 25C, VS = 5 V
Figure 22. Y-Axis Sensitivity at 25C, VS = 5 V
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ADXL323
90 80 70
% OF POPULATION
70 60 50 40 30 20 10 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 2.0 DRIFT (%)
60 50 40 30 20
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% OF POPULATION
10 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 2.0 DRIFT (%)
Figure 23. X-Axis Sensitivity Drift Over Temperature, VS = 3 V
100 90 80
Figure 26. Y-Axis Sensitivity Drift Over Temperature, VS = 3 V
80 70 60
% OF POPULATION
% OF POPULATION
70 60 50 40 30 20
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50 40 30 20
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10 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 2.0 DRIFT (%)
10 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 2.0 DRIFT (%)
Figure 24. X-Axis Sensitivity Drift Over Temperature, VS = 5 V
0.33 N=8 0.32
Figure 27. Y-Axis Sensitivity Drift Over Temperature, VS = 5 V
0.33 N=8 0.32
SENSITIVITY (V/g)
0.30
SENSITIVITY (V/g)
0.31
0.31
0.30
0.29
0.29
0.28
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0.28
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0.27 -30
-20
-10
0
10
20
30
40
50
60
70
80
0.27 -30
-20
-10
0
10
20
30
40
50
60
70
80
TEMPERATURE (C)
TEMPERATURE (C)
Figure 25. X-Axis Sensitivity vs. Temperature Eight Parts Soldered to PCB, VS = 3 V
Figure 28. Y-Axis Sensitivity vs. Temperature Eight Parts Soldered to PCB, VS = 3 V
Rev. 0 | Page 9 of 16
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ADXL323
600
T
500
400
CURRENT (A)
4
300
3
200
2 1
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100
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0 0 1 2 3 SUPPLY (V) 4 5 6
CH1 1.00V BW CH2 500mV CH3 500mV CH4 500mV
B W
M1.00ms T 9.400%
A CH1
300mV
Figure 29. Typical Current Consumption vs. Supply Voltage
Figure 30. Typical Turn-On Time; CX, CY = 0.0047 F, VS = 3 V
Rev. 0 | Page 10 of 16
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ADXL323 THEORY OF OPERATION
The ADXL323 is a complete 2-axis acceleration measurement system on a single, monolithic IC. The ADXL323 has a measurement range of 3 g minimum. It contains a polysilicon surface micromachined sensor and signal conditioning circuitry to implement an open-loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer can measure the static acceleration of gravity in tilt sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The sensor is a polysilicon surface micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180 out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. The demodulator output is amplified and brought off-chip through a 32 k resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL323 uses a single structure for sensing the X-axis and Y-axis. As a result, the sense directions of the two axes are highly orthogonal with little cross axis sensitivity. Mechanical misalignment of the sensor die to the package is the chief source of cross axis sensitivity. Mechanical misalignment can, of course, be calibrated out at the system level.
PERFORMANCE
Rather than using additional temperature compensation circuitry, innovative design techniques ensure that high performance is built in to the ADXL323. As a result, there is neither quantization error nor nonmonotonic behavior, and temperature hysteresis is very low (typically less than 3 mg over the -25C to +70C temperature range). Figure 13 and Figure 16 show the zero g output performance of eight parts (X-axis and Y-axis) soldered to a PCB over a -25C to +70C temperature range. Figure 25 and Figure 28 demonstrate the typical sensitivity shift over temperature for supply voltages of 3 V. This is typically better than 1% over the -25C to +70C temperature range.
Rev. 0 | Page 11 of 16
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ADXL323 APPLICATIONS
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 F capacitor, CDC, placed close to the ADXL323 supply pins adequately decouples the accelerometer from noise on the power supply. However, in applications where noise is present at the 50 kHz internal clock frequency (or any harmonic thereof), additional care in power supply bypassing is required because this noise can cause errors in acceleration measurement. If additional decoupling is needed, a 100 (or smaller) resistor or ferrite bead can be inserted in the supply line. Additionally, a larger bulk bypass capacitor (1 F or greater) can be added in parallel to CDC. Ensure that the connection from the ADXL323 ground to the power supply ground is low impedance because noise transmitted through ground has an effect similar to that of noise transmitted through VS. Never expose the ST pin to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for example, if there are multiple supply voltages), a low VF clamping diode between ST and VS is recommended.
DESIGN TRADE-OFFS FOR SELECTING FILTER CHARACTERISTICS: THE NOISE/BW TRADE-OFF
The selected accelerometer bandwidth ultimately determines the measurement resolution (smallest detectable acceleration). Filtering can be used to lower the noise floor to improve the resolution of the accelerometer. Resolution is dependent on the analog filter bandwidth at XOUT and YOUT. The output of the ADXL323 has a typical bandwidth of greater than 1600 Hz. The user must filter the signal at this point to limit aliasing errors. The analog bandwidth must be no more than half the analog-to-digital sampling frequency to minimize aliasing. The analog bandwidth can be further decreased to reduce noise and improve resolution. The ADXL323 noise has the characteristics of white Gaussian noise, which contributes equally at all frequencies and is described in terms of g/Hz (the noise is proportional to the square root of the accelerometer bandwidth). The user should limit bandwidth to the lowest frequency needed by the application to maximize the resolution and dynamic range of the accelerometer. With the single-pole, roll-off characteristic, the typical noise of the ADXL323 is determined by
rms Noise = Noise Density x ( BW x 1.6 )
SETTING THE BANDWIDTH USING CX, CY, AND CZ
The ADXL323 has provisions for band limiting the XOUT pin and the YOUT pin. Capacitors must be added at these pins to implement low-pass filtering for antialiasing and noise reduction. The equation for the 3 dB bandwidth is F-3 dB = 1/(2(32 k) x C(X, Y, Z)) or more simply F-3 dB = 5 F/C(X, Y, Z) The tolerance of the internal resistor (RFILT) typically varies as much as 15% of its nominal value (32 k), and the bandwidth varies accordingly. A minimum capacitance of 0.0047 F for CX, CY, and CZ is recommended in all cases. Table 5. Filter Capacitor Selection, CX, CY, and CZ
Bandwidth (Hz) 1 10 50 100 200 500 Capacitor (F) 4.7 0.47 0.10 0.05 0.027 0.01
Often, the peak value of the noise is desired. Peak-to-peak noise can only be estimated by statistical methods. Table 6 is useful for estimating the probabilities of exceeding various peak values, given the rms value. Table 6. Estimation of Peak-to-Peak Noise
Peak-to-Peak Value 2 x rms 4 x rms 6 x rms 8 x rms % of Time that Noise Exceeds Nominal Peak-to-Peak Value 32 4.6 0.27 0.006
SELF TEST
The ST pin controls the self-test feature. When this pin is set to VS, an electrostatic force is exerted on the accelerometer beam. The resulting movement of the beam allows the user to test if the accelerometer is functional. The typical change in output is -500 mg (corresponding to -150 mV) in the X-axis, and 500 mg (or 150 mV) on the Y-axis. This ST pin can be left open circuit or connected to common (COM) in normal use.
USE WITH OPERATING VOLTAGES OTHER THAN 3 V
The ADXL323 is tested and specified at VS = 3 V; however, it can be powered with VS as low as 1.8 V or as high as 5.25 V. Note that some performance parameters change as the supply voltage is varied.
Rev. 0 | Page 12 of 16
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ADXL323
The ADXL323 output is ratiometric; therefore, the output sensitivity (or scale factor) varies proportionally to the supply voltage. At VS = 5 V, the output sensitivity is typically 550 mV/g. At VS = 2 V, the output sensitivity is typically 190 mV/g. The zero g bias output is also ratiometric, so the zero g output is nominally equal to VS/2 at all supply voltages. The output noise is not ratiometric but is absolute in volts; therefore, the noise density decreases as the supply voltage increases. This is because the scale factor (mV/g) increases, while the noise voltage remains constant. At VS = 5 V, the noise density is typically 180 g/Hz, while at VS = 1.8 V, the noise density is typically 360 g/Hz. Self-test response in g is roughly proportional to the square of the supply voltage. However, when ratiometricity of sensitivity is factored in with supply voltage, the self-test response in volts is roughly proportional to the cube of the supply voltage. For example, at VS = 5 V, the self-test response for the ADXL323 is approximately -700 mV for the X-axis and +700 mV for the Y-axis.
XOUT = -1g YOUT = 0g
At VS = 1.8 V, the self-test response is approximately -40 mV for the X-axis and +40 mV for the Y-axis. The supply current decreases as the supply voltage decreases. Typical current consumption at VS = 5 V is 500 A, and typical current consumption at VS = 1.8 V is 180 A.
AXES OF ACCELERATION SENSITIVITY
AY
TOP
AX
Figure 31. Axes of Acceleration Sensitivity, Corresponding Output Voltage Increases When Accelerated Along the Sensitive Axis
TOP
GRAVITY
XOUT = 0g YOUT = 1g
TOP
TOP
XOUT = 0g YOUT = -1g
TOP
XOUT = 1g YOUT = 0g
TOP
XOUT = 0g YOUT = 0g
XOUT = 0g YOUT = 0g
Figure 32. Output Response vs. Orientation to Gravity
Rev. 0 | Page 13 of 16
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ADXL323 OUTLINE DIMENSIONS
0.20 MIN 0.20 MIN
13 16 1
PIN 1 INDICATOR 2.43 1.75 SQ 1.08
PIN 1 INDICATOR
TOP VIEW
4.15 4.00 SQ 3.85 0.65 BSC
12
BO TTOM VIEW
9 8 5 4
0.55 0.50 0.45 1.50 1.45 1.40 SEATING PLANE 0.05 MAX 0.02 NOM 0.35 0.30 0.25 COPLANARITY 0.05
1.95 BSC
Figure 33. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ] 4 mm x 4 mm Body, Thick Quad (CP-16-5) Dimensions shown in millimeters
ORDERING GUIDE
Model ADXL323KCPZ 1 ADXL323KCPZ-RL1 EVAL-ADXL323Z1
1
Measurement Range 3 g 3 g
Specified Voltage 3V 3V
Temperature Range -25C to +70C -25C to +70C
Package Description 16-Lead LFCSP_LQ 16-Lead LFCSP_LQ Evaluation Board
Package Option CP-16-5 CP-16-5
Z = Pb-free part.
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ADXL323 NOTES
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ADXL323 NOTES
(c)2006 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D06237-0-8/06(0)
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